Introduction to MEMS design- video lectures and possible to download


http://webcast.berkeley.edu/course_details.php?seriesid=1906978157

Wed 1/19
Introduction: What is MEMS, and What Subset Will EE 245 Cover?
View archived webcastFri 1/21Basic IC/MEMS Fabrication
View archived webcastWed 1/26Deposition, Etching
View archived webcastFri 1/28Surface & Bulk Micromachining
View archived webcastWed 2/2More Bulk & Surface Micromachining
View archived webcastFri 2/4More Bulk & Surface Micromachining
View archived webcastWed 2/9Beams
View archived webcastFri 2/11Gaps
View archived webcastWed 2/16Lecture 9
View archived webcastFri 2/18Lecture 10
View archived webcastWed 2/23Guest Lecture: Matt Last
View archived webcastFri 2/25Resonators
View archived webcastWed 3/2Better Approximations: Parallel Plates, Couette Damping, Squeeze Film Damping, Effective Mass, Electrostatic
View archived webcastFri 3/4Electrostatic Pull-in; Thermal Conductivity, Thermal Capacity, Thermal Time Constant
View archived webcastWed 3/9Foundry Processes
View archived webcastFri 3/11Lecture 16
View archived webcastWed 3/16Lecture 17
View archived webcastFri 3/18Lecture 18
View archived webcastWed 3/23Spring Recess
View archived webcastFri 3/25Spring Recess & Holiday: Cesar Chavez
View archived webcastWed 3/30Lecture 19
View archived webcastFri 4/1Lecture 20
View archived webcastWed 4/6No Lecture
View archived webcastFri 4/8Lecture 21
View archived webcastWed 4/13Lecture 22
View archived webcastFri 4/15Lecture 23
View archived webcastWed 4/20Lecture 24
View archived webcastFri 4/22Lecture 25
View archived webcastWed 4/27Lecture 26
View archived webcastFri 4/29Lecture 27
View archived webcastWed 5/4Lecture 28
View archived webcastFri 5/6Lecture 29


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